99.992% 28Si CVD-grown epilayer on 300 mm substrates for large scale integration of silicon spin qubits
نویسندگان
چکیده
منابع مشابه
Superconducting qubits on silicon substrates for quantum device integration
Andrew J. Keller, 2 Paul B. Dieterle, 2 Michael Fang, 2 Brett Berger, 2 Johannes M. Fink, 2, 3 and Oskar Painter 2 Kavli Nanoscience Institute and Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125 Institute of Quantum Information and Matter, California Institute of Technology, Pasadena, CA 91125 Institute of Science and Technology Austria, 34...
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ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2019
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2018.12.010